// Scanning Electron Microscopy and Energy Dispersive X-Ray Microanalysis

ZSW operates a state-of-the-art high-resolution scanning electron microscope (HR-SEM) with a Schottky field emission gun. The HR-SEM can image the morphology of materials and is therefore particularly suited for the examination of very thin films in the micro- or nano-metre size range. The areas of application for this technique range from materials research and development to quality control and failure analysis.

Besides the imaging of surfaces, the electron microscope offers the possibility to qualitatively or quantitatively determine the elemental composition of the sample with the help of an additional detector for energy dispersive x-ray microanalysis (EDX) attached to the HR-SEM.

We offer scanning electron microscopy and x-ray microanalysis as a service for external customers from industry and research.

Areas of Application

  • Morphology and chemical composition of surface coatings
  • Layer thickness and layer construction
  • Grain structure, grain size, fracture surfaces of metals, semiconductors, ceramics
  • Lateral element distribution images
  • Size and type of inclusions, precipitates, and foreign phases in thin films
  • Shape, size and chemical composition of particles, abrasion particles, residues, coatings
  • Porosity of membranes
  • Origins of damage (abrasion, corrosion, melting, welding, mechanical failure)


  • Field emission scanning electron microscope XL30 SFEG "Sirion" from FEI Company
  • EDX detector with a resolution of 129 eV and the VANTAGE DI micro-analysis system from NORAN


  • High-Resolution Scanning Electron Microscope (HR-SEM): (HREM)
  • Energy Dispersive X-Ray Microanalysis (EDX):(EDX)



Dr. Theresa Friedlmeier
+49 (0)711 78 70-293
Ultra-high-resolution field emission scanning electron microscope with EDX detector